- dry chemical etching technology
- Микроэлектроника: технология сухого травления
Универсальный англо-русский словарь. Академик.ру. 2011.
Универсальный англо-русский словарь. Академик.ру. 2011.
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
photography, technology of — Introduction equipment, techniques, and processes used in the production of photographs. The most widely used photographic process is the black and white negative–positive system (Figure 1 >). In the camera the lens projects an image of… … Universalium
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
photoengraving — /foh toh en gray ving/, n. 1. a photographic process of preparing printing plates for letterpress printing. 2. a plate so produced. 3. a print made from it. [1870 75; PHOTO + ENGRAVING] * * * Any of several processes for producing printing plates … Universalium
Pad printing — is a printing process that can transfer a 2 D image onto a 3 D object. This is accomplished using an indirect offset (gravure) printing process that involves an image being transferred from the printing plate (cliché) via a silicone pad onto a… … Wikipedia
Phosphoric acid — This article is about orthophosphoric acid. For other acids commonly called phosphoric acid , see Phosphoric acids and phosphates. Phosphoric acid … Wikipedia
Surface micromachining — is a process used to produce micromachinery or MEMS.Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining is based on the deposition and etching of different structural… … Wikipedia
Zinc oxide — Other names Zinc white Calamine Identifiers … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia